WebOPAC Local書誌詳細

Login

Bibliography Details

Aichi Institute of Technology Library

Back to previous

	Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena Vol. 9, no. 1 (Jan./Feb. 1991)-. -- American Institute of Physics, 1991. <SB00124486> Functions: Select Export Destination Please select the export destination. Close this window Details URL:

Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena Vol. 9, no. 1 (Jan./Feb. 1991)-. -- American Institute of Physics, 1991. <SB00124486> Functions: Select Export Destination Please select the export destination. Close this window Details URL:

Collective HoldingsList 1-1 of about 1

Click a book volume to display details about the collection.

No.	Location	Call No	Volume	Available Years/Months	Accession status	user2
0001	手動集密書架	Ｐ－Ｊ	9-16	1991-1998

-- 2022/03/10 by Takeuchi Del End --%> -- 2022/03/10 by Takeuchi Del End --%>


No.	0001
Library	Library
Location	手動集密書架
Location2
Call No	Ｐ－Ｊ
Volume	9-16
Available Years/Months	1991-1998
Accession status
user2

Go to the top of this page

Contents and Summary

Go to the top of this page

Bibliography Details

title and statement of responsibility area	Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena
Volumes and Years of Serial	Vol. 9, no. 1 (Jan./Feb. 1991)-
publication,distribution,etc.,area	New York : American Institute of Physics , 1991-
physical description area	v. : ill. ; 29 cm
NCID	AA10804928
text language code	English
frequency of publication code	Bimonthly
ISSN	10711023
relation bibliography link	継続前誌 :Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society <SB00124099>

Go to the top of this page

Back to previous

Go to the top of this page